JPH0332697B2 - - Google Patents
Info
- Publication number
- JPH0332697B2 JPH0332697B2 JP7140784A JP7140784A JPH0332697B2 JP H0332697 B2 JPH0332697 B2 JP H0332697B2 JP 7140784 A JP7140784 A JP 7140784A JP 7140784 A JP7140784 A JP 7140784A JP H0332697 B2 JPH0332697 B2 JP H0332697B2
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- clean
- room
- mobile
- items
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000006854 communication Effects 0.000 claims description 22
- 238000004891 communication Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 9
- 238000012423 maintenance Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 18
- 230000003749 cleanliness Effects 0.000 description 10
- 239000000428 dust Substances 0.000 description 10
- 238000011109 contamination Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 239000005022 packaging material Substances 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000013305 food Nutrition 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7140784A JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7140784A JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60213754A JPS60213754A (ja) | 1985-10-26 |
| JPH0332697B2 true JPH0332697B2 (en]) | 1991-05-14 |
Family
ID=13459628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7140784A Granted JPS60213754A (ja) | 1984-04-09 | 1984-04-09 | 清浄保持必要物運搬方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60213754A (en]) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63144527U (en]) * | 1987-03-12 | 1988-09-22 | ||
| JP2529246B2 (ja) * | 1987-03-20 | 1996-08-28 | 松下電器産業株式会社 | クリ−ン空間のメンテナンス装置 |
| KR960007979B1 (ko) * | 1991-04-17 | 1996-06-17 | 마쯔시다덴기산교 가부시기가이샤 | 클리인공간시스템 |
| US5326316A (en) * | 1991-04-17 | 1994-07-05 | Matsushita Electric Industrial Co., Ltd. | Coupling type clean space apparatus |
| WO2019141770A1 (en) * | 2018-01-19 | 2019-07-25 | Assa Abloy Entrance Systems Ab | Door entrance system |
-
1984
- 1984-04-09 JP JP7140784A patent/JPS60213754A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60213754A (ja) | 1985-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7014672B2 (en) | Carrying vehicle, manufacturing apparatus, and carrying system | |
| US5425793A (en) | Coupling-type clean space apparatus | |
| JP3476395B2 (ja) | クリーンルーム及びクリーンルームの空調方法 | |
| JPH08510826A (ja) | 環境制御システム | |
| US6581778B1 (en) | Powder receiving device | |
| JP4803196B2 (ja) | 自動細胞培養施設 | |
| JPH0332697B2 (en]) | ||
| JP4029968B2 (ja) | 搬送車、製造装置及び搬送システム | |
| JP3036873B2 (ja) | 超清浄囲繞コンテナ用吹き出しドア | |
| JP3852570B2 (ja) | クリーンルーム装置 | |
| JPH0231496Y2 (en]) | ||
| JPH0334581Y2 (en]) | ||
| JPH026051Y2 (en]) | ||
| JP2002231782A (ja) | 半導体ウエハの移送方法、半導体装置の製造方法およびプロセス装置 | |
| JP4660954B2 (ja) | アイソレータからの物品排出装置 | |
| JP3994806B2 (ja) | オートドア付き搬送設備 | |
| JP3014860B2 (ja) | 搬入搬出装置 | |
| JPH0632449A (ja) | 半導体製造プロセスにおけるウエハ搬送・保管システム | |
| JP2000085962A (ja) | クリーン作業装置 | |
| JPH06100356B2 (ja) | ライン形クリーンキューブ装置 | |
| JPS63131941A (ja) | 移動式クリ−ンユニツト | |
| JP2590933Y2 (ja) | 台車搬送用開閉式密封筒状搬送装置 | |
| JP2007117336A (ja) | エアー搬送ダクト付き乾燥機、および、洗濯物の搬送方法 | |
| JP3122159B2 (ja) | クリーンルームの送風制御方式 | |
| JP4368169B2 (ja) | クリーン室間における物体移送用通路 |